Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters
- Creator: Bazaei, Ali , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2012
Ultra low frequency FM sensing of piezoelectric strain voltage
- Creator: Laskovski, Anthony N. , Yuce, Mehmet R. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2012